Surface modification of Kapton film by plasma treatments

Abstract Kapton films were treated with seven plasmas: Ar‐, N 2 ‐, O 2 ‐, CO‐, CO 2 ‐, NO‐, and NO 2 ‐ plasmas. Surface properties and chemical composition of the plasma‐treated Kapton films were investigated from the contact angle measurement, and the IR and XPS spectra. The plasmas, especially NO‐ and NO 2 ‐plasma, made the Kapton film surface hydrophilic. The XPS and IR spectra showed that the plasma led to the modification of the imide groups in the Kapton film to secondary amide and carboxylate groups.