A new program for the design of electron microscopes

The paper describes the basic features of a new program EOD (Electron Optical Design), primarily intended for the design of systems of electron lenses and deflectors for scanning and transmission electron microscopes. A very accurate first-order finiteelement method in graded topologically regular meshes provides the fields. Electron optical properties can be analyzed from standard paraxial trajectories and aberration integrals for combined lens and deflection systems or, for a general system, from the results of very accurate ray-tracing. The advantage of EOD is that it includes a user-friendly interface, simplifying the output of results and the whole design procedure. EOD is used by undergraduate and postgraduate students at ISI and TU Brno. © 2008