Ultrathin Co/Pt and Co/Pd superlattice films for MgO-based perpendicular magnetic tunnel junctions

Ultrathin [Co/Pt]n and [Co/Pd]n superlattice films consisting of 0.14–0.20-nm-thick Co and Pt(Pd) layers were deposited by sputtering. A large perpendicular magnetic anisotropy [(3–9)×106 ergs/cm3] and an ideal square out-of-plane hysteresis loop were attained even for ultrathin superlattice films with a total thickness of 1.2–2.4 nm. The films were stable against annealing up to 370 °C. MgO-based perpendicular magnetic tunnel junctions with this superlattice layer as the free layer showed a relatively high magnetoresistance ratio (62%) and an ultralow resistance-area product (3.9 Ω μm2) at room temperature. The use of these films will enable the development of gigabit-scale nonvolatile memory.