A “micro-macro” integrated planar MEMS tactile sensor for precise modeling and measurement of fingertip sensation

In this study, a novel “micro-macro” planer MEMS tactile sensor integrating two different scales of tactile sensors has been developed for artificial realization of human's fingertip feeling. The “micro-scale” tactile sensor detects “micro surface shape” and “micro-area frictional force” that are generated and detected at a fingerprint on human's fingertip skin. On the other hand, the integrated “macro-scale” tactile sensor detects “overall contact pressure” and “macro-area sliding friction” that are detected by wide-area on fingertip skin. Since the combination of “micro and macro” tactile information has an important meaning in human's fingertip sensation, this tactile sensor realizes multi-scale tactile detection at the same time and at the same point on the sample surface. It will be a very powerful tool for understanding how humans recognize objects using their fingertip skin sensation.