材料科学
半导体
折射率
溅射
原子层沉积
电介质
色散(光学)
纳米复合材料
图层(电子)
光电子学
沉积(地质)
铝
溅射沉积
光学
薄膜
复合材料
纳米技术
物理
沉积物
生物
古生物学
作者
Søren A. Tornøe,Jacob H. Sands,Nobuhiko P. Kobayashi
标识
DOI:10.1016/j.apmt.2023.101921
摘要
In our previous publication, we discussed the optical properties of short-period multi-layered nanocomposites consisting of 300 pairs of an AlOx layer and a Cu layer produced from sputtering atomic layer augmented deposition (SALAD). These samples displayed unusual spectral reflectance that could not be well described via conventional means and could not be explained as an interpolation of the constituent materials, which is most likely due to the fact that the samples optically behave as a homogeneous composite rather than a multi-layered structure. Thus, in the present study, dispersion relation modeling (DRM) is used to extract fundamental optical constants – refractive index – to assess distinctive optical properties of the samples. While the DRM model implemented proved to be imperfect with regard to purely non-holomorphic materials, preliminary results nevertheless predicts that the samples – composed of multiple layers of metal and dielectric – should display semiconductor-like optical behavior, therefore, indicating SALAD can potentially yield materials, by combining metal and dielectric, that virtually behave as semiconductors.
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