Development of Gallium Nitride Coating via Aerosol Deposition

Abstract This study primarily demonstrates the feasibility of using aerosol deposition to produce thin GaN coatings through systematic investigation. To date, the roles of particle size and powder morphology in the consolidation of ceramic particles during aerosol deposition remain unclear. To enhance understanding of this process, two GaN powders, one coarse agglomerated and the other a fine monolithic powder, were deposited under various process conditions. The findings revealed that fine GaN powder is more effective in forming denser coating layers as compared to agglomerated GaN powder. Furthermore, the use of helium gas at higher pressures was observed to enhance coating formation in comparison with nitrogen gas. This study not only validates the potential of aerosol deposition for forming thin GaN coatings but also contributes to our understanding of the critical role that particle sizes play in the aerosol deposition process.