Nonequilibrium atmospheric pressure plasma jet using a combination of 50 kHz/2 MHz dual-frequency power sources

An atmospheric pressure plasma jet is generated by dual sinusoidal wave (50 kHz and 2 MHz). The dual-frequency plasma jet exhibits the advantages of both low frequency and radio frequency plasmas, namely, the long plasma plume and the high electron density. The radio frequency ignition voltage can be reduced significantly by using dual-frequency excitation compared to the conventional radio frequency without the aid of the low frequency excitation source. A larger operating range of α mode discharge can be obtained using dual-frequency excitation which is important to obtain homogeneous and low-temperature plasma. A larger controllable range of the gas temperature of atmospheric pressure plasma could also be obtained using dual-frequency excitation.