Tolerance analysis of multilayer diffractive optics based on polychromatic integral diffraction efficiency

Multilayer diffractive optical elements (MLDOEs) can achieve high diffraction efficiency for broadband wavelength. Polychromatic integral diffraction efficiency (PIDE) is the key concern for evaluating diffraction efficiency over the waveband. The modulation transfer function of a hybrid refractive-diffractive optical system is directly affected by the PIDE. The relationship between PIDE and continuous manufacturing errors for microstructure heights and periodic widths of MLDOEs is studied theoretically in this paper, and an example of MLDOEs is discussed in the visible waveband. The analysis results can be used for manufacturing error control in microstructure heights and periodic widths.