Abstract 1. From the untreated hydrolyzate of ethyldichlorosilane, cyclic trimer (C2H5SiHO)3 and tetramer (C2H6SiHO)4, and from the pyrolyzed hydrolyzate cyclic trimer, tetramer and pentamer (C2H5SiHO)5 have been acquired and characterized. 2. The reactivity of the siloxane (Si–O–Si) linkage in the (C2H5SiHO)n compounds toward acid cleavage appears to be not so enhanced as that exhibited by the (CH3SiHO)n compounds.