Coupling Interference between Eddy Current Sensors for the Radial Displacement Measurement of a Cylindrical Target

In the radial displacement measurement of a small-sized cylindrical target, coupling interference between eddy current sensors reduces the accuracy of the measurement. In this study, finite element method (FEM) simulation based on ANSYS Maxwell was adopted to investigate the relationships between the coupling coefficient of the sensors and different parameters including the lift-off, cylinder diameter, axis angle, material, and excitation frequency. The experimental results were consistent with the simulation results. The coupling interference between the sensors increased with the decrease in the lift-off and cylinder diameter. The coupling effect decreased significantly when the probe axis angle increased to 120°, and the decrease in the sensor sensitivity was acceptable. A polynomial fitting function fitted the output signal well. A compensation method was given based on the compensation necessity evaluation. The results showed that the error of the rotor motion track was significantly decreased after compensation.