钝化
光电子学
材料科学
纳米光子学
退火(玻璃)
砷化镓
原子层沉积
光致发光
兴奋剂
光子学
砷化铟镓
自发辐射
磷化铟
光学
图层(电子)
纳米技术
激光器
物理
复合材料
作者
Nicolas M. Andrade,Sean Hooten,Yunjo Kim,Jeehwan Kim,Eli Yablonovitch,Ming C. Wu
摘要
The III–V InP/InGaAsP/InGaAs material family is important for photonic devices due to its optical emission and absorption in the 1.55 and 1.3 μm telecommunication bands for optical interconnects. However, InGaAsP/InGaAs generally suffer from relatively high surface recombination velocity—compared to Si [Das et al., in 2020 47th IEEE Photovoltaic Specialists Conference (PVSC) (IEEE, Calgary, AB, 2020), pp. 1167–1170] and InP [Joyce et al., Nano Lett. 12, 5325–5330 (2012)], which reduces the efficiency and can increase the noise in nanophotonic devices. Here, we demonstrate an efficient method to passivate the surface using a combination of sulfur-saturated ammonium sulfide and atomic layer deposition. After annealing, the surface passivation led to a surface recombination velocity as low as 45 cm/s, corresponding to a >180× increase in the photoluminesence of a nanoscale light-emitting device with 200 nm width.
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