Abstract A few of acyclic and cyclic silyl ethers were firstly synthesized in good yields by reactions of silyl triflimides with alcohol or ether. The corresponding silyl triflimides were easily produced by protodesilylation of phenyl or allyl silanes with HNTf 2 . All new compounds were characterized by 1 H NMR, 13 C NMR, MS, IR and HRMS.