Global Model in Low-Pressure Oxygen Discharges

We use a global model (volume averaged) to study plasma discharges in molecular oxygen gas in the pressure range of 1- 78 mTorr. This model determines positive ions O2+, O+, negative ion O-, and electron densities, ground state O2 and O atoms and metastable O2(a1Δg) and O(1D) densities, and electron temperature as function of gas pressure and input power, for a cylindrical discharge. We apply the model to O2 discharges and the results are compared to experimental data and a more elaborated volume-averaged global model developed at the University of California at Berkeley.