To research on the magnetism characteristic of ZnO and Y-doped ZnO films,full-potential linearized augmented plane-wave method based on the state-of-art DFT(Density Functional Theory) were employed.The influence of the intrinsic defects such as VO and VZn on the magnetism of ZnO film was analysed.The results show the magnetism characteristics of ZnO and Y-doped ZnO films are all brought from the spin-polarized O atoms around Zn vacancy.