Research and Fabrication of a Bi-directional Piezoelectric Micropump

Adopting the MEMS technique, such as the oxidation, lithography, etching and bonding etc, a new bi-directional valveless piezoelectric micropump on the silicon was researched. The whole external size is 30 mm×14 mm×3mm, the pump chamber volume is about 10 mm~3. Through the experiments testing, the relationship between the pump pressure, flow rate and working frequency, driving waveform and voltage peak value are analysed. When the working voltage is 110V, frequency is 40 Hz, the micropump could generate the maximum pump pressure of 120 mm H_2O for forward direction, and the maximum flow rate could be the 70 μL/min at the 50-90 Hz frequency. when the frequency is 35 Hz, this micropump could generate the maximum pump pressure of 70mm H_2O for backward direction, and the maximum flow rate could be the 56μL/min.