Optimization of Thermoelectric Performance of Ag2Te Films via a Co-Sputtering Method

Providing self-powered energy for wearable electronic devices is currently an important research direction in the field of thermoelectric (TE) thin films. In this study, a simple dual-source magnetron sputtering method was used to prepare Ag2Te thin films, which exhibit good TE properties at room temperature, and the growth temperature and subsequent annealing process were optimized to obtain high-quality films. The experimental results show that films grown at a substrate temperature of 280 °C exhibit a high power factor (PF) of ~3.95 μW/cm·K2 at room temperature, which is further improved to 4.79 μW/cm·K2 after optimal annealing treatment, and a highest PF of ~7.85 μW/cm·K2 was observed at 200 °C. Appropriate annealing temperature effectively increases the carrier mobility of the Ag2Te films and adjusts the Ag/Te ratio to make the composition closer to the stoichiometric ratio, thus promoting the enhancement of electrical transport properties. A TE device with five legs was assembled using as-fabricated Ag2Te thin films. With a temperature difference of 40 K, the device was able to generate an output voltage of approximately 14.43 mV and a corresponding power of about 50.52 nW. This work not only prepared a high-performance Ag2Te film but also demonstrated its application prospects in the field of self-powered electronic devices.