Ultrasensitive Tilt Sensor Using Liquid Metal

We report an innovative liquid metal-based tilt sensor which shows orders of magnitude higher sensitivity than previous tilt sensors. This simple resistive sensor is designed to have a dense array of serpentine laser-induced graphene (LIG) electrode in a racetrack shape with linewidth in the range of $100\sim 200\mu \mathrm{m}$. The key aspect of this tilt sensor is non-wetting lyophobic characteristics of the LIG electrode surface against gallium based liquid metal alloy. Due to high conductivity of liquid metal, this tilt sensor provides extremely high sensitivity of 8.9 $\mathrm{k}\Omega/^{\circ}$ in the tilt angle between −45° and 45°.