Optical properties of fused silica glass using spectroscopic ellipsometry from 0.4 meV to 8.5 eV

Fused silica is used for a variety of applications due to its high transparency, low thermal expansion, and excellent chemical and thermal stability. Ellipsometric spectra of fused silica glass are collected from three different instruments from the terahertz (0.4 meV) to the vacuum ultraviolet (8.5 eV) range and are modelled simultaneously. Unpolarized transmittance is used to quantify low values of absorption from 0.032 to 8.5 eV. A continuous parameterization of complex dielectric function (ɛ = ɛ1 + iɛ2) spectra from 0.4 meV to 8.5 eV is developed.