Wafer-Scale Platform of PLZT on $\text{SiO}_{2}/ \text{Si}$ Substrate Toward Realizing High-Speed Optical Modulation

Lanthanum doped lead zirconate titanate (PLZT) deposited on$\text{SiO}_{2}/ \text{Si}$wafer was suggested as a new platform for fabricating optical modulators. This enabled a high-speed Mach-Zehnder modulator with$V_{\pi} L=1.3 \mathrm{V} \cdot \text{cm}$.