掺杂剂
Crystal(编程语言)
稳态(化学)
半导体
晶体生长
材料科学
机械
计算机模拟
凝聚态物理
化学
热力学
物理
光电子学
计算机科学
兴奋剂
物理化学
程序设计语言
作者
В. А. Гончаров,A. N. Dormidontov
出处
期刊:Semiconductors
[Pleiades Publishing]
日期:2014-12-01
卷期号:48 (13): 1716-1719
标识
DOI:10.1134/s1063782614130089
摘要
The effect of non-steady-state perturbations in the growth setup on the formation of microscopic dopant inhomogeneities in a crystal is studied. The inhomogeneity value for an error of temperature maintenance error of the heaters within 0.05–1 K and irregular cell displacements in the furnaces with a step from 0.01 to 0.1 mm is determined using numerical simulation. The results obtained can be used to formulate requirements for designing equipment for growing semiconductor crystals by the vertical Bridgman method.
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