氢氟酸
电解质
碳酸乙烯酯
化学
碳酸盐
碳酸二甲酯
碳酸二乙酯
硅
无机化学
碳酸锂
锂(药物)
蚀刻(微加工)
薄脆饼
钝化
电化学
材料科学
离子
电极
图层(电子)
物理化学
有机化学
纳米技术
催化作用
离子键合
内分泌学
医学
作者
Simon Lux,Ivan T. Lucas,Elad Pollak,Stefano Passerini,Martin Winter,Robert Kostecki
标识
DOI:10.1016/j.elecom.2011.10.026
摘要
Spectroscopic ellipsometry was used to study the time-dependent formation of HF upon the thermal degradation of LiPF6 at 50 °C in a lithium ion battery electrolyte containing ethylene carbonate and diethyl carbonate. The generated HF was monitored by following the etching rate of a 300 nm thick SiO2 layer, grown on both sides of a silicon wafer substrate, as a function of the immersion time in the electrolyte at 50 °C. It was found that the formation of HF starts after 70 h of exposure time and occurs following several different phases. The amount of generated HF was calculated using an empirical formula correlating the etching rate to the temperature. Combining the results of the HF formation with literature data, a simplified mechanism for the formation of the HF involving LiPF6 degradation, and a simplified catalytical reaction pathway of the formed HF and silicon dioxide are proposed to describe the kinetics of HF formation.
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