A Study of the Gettering Characteristics of Getter Pumps for Different Gases

Abstract— The gettering characteristics of Ti–Zr–Al getter pumps with internal and external heaters have been measured for Н2 and CO. The results are compared to the measured similar characteristics of an NEX‑Torr D 100-05 combined pump from SAES Getters and a titanium sublimation film at temperatures of 300 and 77 K.