背板
薄膜晶体管
材料科学
有机发光二极管
光电子学
阈值电压
可靠性(半导体)
亮度
制作
电压
晶体管
电气工程
光学
复合材料
工程类
功率(物理)
物理
病理
医学
量子力学
替代医学
图层(电子)
作者
Yujiro Takeda,Mehadi Aman,Shogo Murashige,Kazuatsu Ito,Izumi Ishida,Hiroshi Matsukizono,Naoki Makita
摘要
High performance IGZO TFTs with top gate structure were developed for an automotive OLED display backplane. Fabrication processes are optimized by balancing oxygen and hydrogen contents with μ-PCD method. The mobility of the IGZO TFTs reaches as high as 32 cm2/Vs with enhanced threshold voltages. We have checked the TFTs reliability under the positive bias temperature (PBT), negative bias temperature (NBT) and negative bias temperature illumination (NBTI) stress tests. As the IGZO TFTs shows slight changes of threshold voltage (Vth) within ±0.5V under PBT and NBT and even after NBTI stress tests, there is no critical deterioration. We expect these high mobility IGZO TFTs are stable enough to be used for OLED or other self-luminous displays. We have also demonstrated a prototype 12.3" OLED module for automotive applications. The prototype flexible display showed an excellent brightness uniformity even after bending.
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