离子
原子物理学
偏压
等离子体
感应耦合等离子体
蒙特卡罗方法
振幅
氩
工作(物理)
能量(信号处理)
蚀刻(微加工)
相(物质)
电压
材料科学
化学
计算物理学
物理
光学
有机化学
复合材料
统计
热力学
量子力学
数学
图层(电子)
作者
Mingliang Zhao,Yuru Zhang,Fei Gao,You‐Nian Wang
出处
期刊:Plasma Science & Technology
[IOP Publishing]
日期:2023-04-05
卷期号:25 (7): 075402-075402
标识
DOI:10.1088/2058-6272/acb52c
摘要
Abstract In this work, a two-dimensional hybrid model, which consists of a bulk fluid module, a sheath module and an ion Monte-Carlo module, is developed to investigate the modulation of ion energy and angular distributions at different radial positions in a biased argon inductively coupled plasma. The results indicate that when the bias voltage amplitude increases or the bias frequency decreases, the ion energy peak separation width becomes wider. Besides, the widths of the ion energy peaks at the edge of the substrate are smaller than those at the center due to the lower plasma density there, indicating the nonuniformity of the ion energy distribution function (IEDF) along the radial direction. As the pressure increases from 1 to 10 Pa, the discrepancy of the IEDFs at different radial positions becomes more obvious, i.e. the IEDF at the radial edge is characterized by multiple low energy peaks. When a dual frequency bias source is applied, the IEDF exhibits three or four peaks, and it could be modulated efficiently by the relative phase between the two bias frequencies. The results obtained in this work could help to improve the radial uniformity of the IEDF and thus the etching process.
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