Improved polarization and endurance in ferroelectric Hf0.5Zr0.5O2 films on SrTiO3(110)

With SrTiO 3 (110) substrates, the ferroelectric polarization of Hf 0.5 Zr 0.5 O 2 improved by 50%, with remanent polarization as high as 33 μC cm −2 in a film of less than 7 nm thickness.