Fully suspended slot waveguide platform

A fully suspended slot waveguide (FSSWG) platform, including straight slot waveguides, 90° bends, high-Q racetrack resonators, and strip-to-slot mode converters, is demonstrated for broadband and low-loss operation in the mid-infrared spectral region. The proposed FSSWG platform has inherent merits of a broad spectral range of transparency which is limited only by the absorption of silicon, strong light–analyte interaction, good mechanical stability, and single lithography step fabrication process. By using asymmetric FSSWGs, the propagation loss, bending loss, and intrinsic optical Q factor are demonstrated to be 2.8 dB/cm, 0.15 dB/90°, and 12 600, respectively. The average conversion efficiency of a mode converter is 95.4% over a bandwidth of 170 nm and 97.0% at 2231 nm. The FSSWG platform would be promising for a long-range and cavity-enhanced light–analyte interaction.