Micromodification of silicon dioxide in a variable pressure/environmental scanning electron microscope

Electron irradiation in the ionized gaseous environment of a variable pressure/environmental scanning electron microscope induces modifications of poorly conducting specimens. In particular it is shown, using nondestructive depth-resolved cathodoluminescence microanalysis, that environmental ions can penetrate into the bulk of the irradiated specimen and modify the local microstructure of the irradiated specimen. The observed modifications are attributed to electric fields associated with trapped electrons and environmental ions. These effects can be controlled by varying the environmental gas and/or electron beam parameters.