材料科学
薄膜晶体管
兴奋剂
阈值电压
晶体管
饱和(图论)
光电子学
阈下摆动
电子迁移率
价(化学)
电压
图层(电子)
纳米技术
电气工程
物理
工程类
组合数学
量子力学
数学
作者
Cong Peng,Panpan Dong,Xifeng Li
出处
期刊:Nanotechnology
[IOP Publishing]
日期:2020-10-20
卷期号:32 (2): 025207-025207
被引量:4
标识
DOI:10.1088/1361-6528/abbc25
摘要
In this letter, the performance of Zn-Sn-O (ZTO) thin film transistors (TFTs) has been greatly improved by Mo doping as an oxygen vacancy to control the residual electrons. The results show that the TFT with 3 at% Mo doping exhibits the best electrical characteristics with a high saturation mobility of 26.53 cm2 V-1 s-1, a threshold voltage of 0.18 V, a subthreshold swing of 0.32 V dec-1 and a large switching ratio of 2 × 106. The saturation mobility and switching ratio of Mo-doped Zn-Sn-O (MZTO, 3 at%) TFTs improved almost five and two orders of magnitude compared with ZTO TFTs, respectively. Therefore, the MZTO TFT has much potential for future electrical applications with its excellent properties.
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