物理
等离子体
联轴节(管道)
输电线路
电力传输
非线性系统
功率(物理)
阻抗匹配
电容耦合
计算物理学
电阻抗
原子物理学
电气工程
电压
工程类
材料科学
量子力学
冶金
作者
Zili Chen,Jingwen Xu,Shimin Yu,Hao Wu,Xiaojiang Huang,Zhijiang Wang,Lianbo Guo,Wei Jiang,Ya Zhang
摘要
Radiofrequency (RF) coaxial cables are one of the vital components for the power sources of capacitively coupled plasmas (CCPs), by which the RF power is transferred to excite the plasma. Usually, the cables can be treated as transmission lines (TLs). However, few studies of TLs in CCP power sources were conducted due to the nonlinear coupling between TLs and the plasma. In this work, we developed a numerical scheme of TLs based on the Lax–Wendroff method and realized the nonlinear bidirectional coupling among the lumped-element model, transmission line model, and electrostatic particle-in-cell model. Based on the combined model, three discharge patterns were found, including weak matching state, normal state, and over matching state. The great differences among the three patterns indicated that the TLs could change the impedance matching of the device and significantly affect the plasma properties.
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