Research of the microelectromechanical switch with different materials of metal membrane

This paper is devoted to the selection of the optimal material for the structural layer of microelectromechanical switches in order to reduce or completely eliminate the stiction of the moving parts of the structure to the fixed, as well as to minimize the values of the control voltages and switching speed without compromising reliability using the Ashby approach. The choice of the most suitable structural layer material is represented by performance indices for a number of key parameters of microelectromechanical switches. It is established that aluminum-based alloys and metals are the most preferable than other available materials for the structural layer of microelectromechanical switches.