Influence of discharge burning conditions on the distribution of parameters of a plasma generated in a non-self-sustaining glow discharge inside a hollow cathode

The parameters of the plasma of a non-self-sustaining glow discharge generated inside a metal hollow cathode 300 mm long and 25 mm in inner diameter are investigated. A feature of this system is the additional injection of electrons from the auxiliary discharge plasma, formed by a plasma source with a combined heated and hollow cathode «PINK». The dependences and combustion modes of a non-self-sustaining glow discharge are presented and described at a pressure in the range (0.06 ÷ 1.4) Pa and a combustion voltage (70 ÷ 300) V. Studies of plasma parameters using double Langmuir probes have shown that this discharge system provides generation nitrogen plasma inside the hollow cathode with inhomogeneity from ± 12 to ± 63%.