Comparisons of glow discharge polymerization between hexamethyldisilazane and trimethylsilyldimethylamine

Abstract Glow discharge polymerization between hexamethyldisilazane (HMDSZ) and trimethylsilyldimethylamine (TMSDMA) was compared by means of infrared spectroscopy and ESCA analysis. Infrared spectra pointed out differences in chemical structure between the polymers prepared from the two monomers, although the two polymers were mainly composed of resembling units such as SiCH3, SiCH2, SiH, SiOSi, and SiOC groups: (i) The polymers prepared from TMSDMA contained N → O group, but the polymers from HMDSZ did not contain this group. (ii) Influences of the W/FM parameter (W is the input energy of rf power, F the flow rate of the monomer, and M the molecular weight of the monomer) appeared on decreasing the CN group and increasing the CO group in the TMSDMA system, but little influence appeared in the HMDSZ system. ESCA spectra (C1s, Si2p, and N1s core levels) supported the differences between the two polymers elucidated by infrared spectroscopy, and pointed out differences in susceptibility of the SiN bond to plasma: The NSi sequence of TMSDMA was completely ruptured in discharge to yield polymers, and the SiNHSi sequence of HMDSZ remained in considerable amount.