退火(玻璃)
光电子学
晶体管
薄膜
阈值电压
结晶度
场效应晶体管
作者
Dong Guo,Susumu Ikeda,Koichiro Saiki,Hiroyuki Miyazoe,Kazuo Terashima
摘要
Pentacene thin film transistors (TFTs) were fabricated by the organic molecular beam deposition method. The TFTs were characterized in order to study the effect of thermal annealing on the morphology and carrier mobility of the transistors. For all the TFT samples the mobility exhibited an Arrhenius relationship with temperature, indicating a thermally activated transport that could be explained by the carrier trap and thermal release transport mechanism. Therefore, in order to investigate the annealing effect, we tested the data for a significant period of time after annealing until the temperature recovered to room temperature, so that the thermal activation effect was screened and possible effects of thermal expansion and stress were also ruled out. As a result, we found that only with a temperature below a critical temperature of approximately 45°C could annealing improve the mobility, while annealing with T>50°C would decrease the mobility compared to the value before annealing. Atomic force microsco...
科研通智能强力驱动
Strongly Powered by AbleSci AI