A Review of Nanoindentation Measuring Instruments for Materials Mechanical Properties

The development and the present situation of nanoindentation instruments are briefly summarized in this paper.The development progress of nanoindentation test in recent years is stated.Then,from aspects of driver,load measuring and displacement measuring,the structures of some representative nanoindentation instruments are introduced and compared.And the integrated technology of nanoindentation instruments is introduced,which includes technology of affecting depth measuring precision,observation,big load module and high temperature testing module.Finally,the future tendency of nanoindentation instruments is presented.