Liquid metal-based terahertz metamaterial sensors with integrated microfluidic channels for sensitive biosensing applications

) of 14.11. The sensors were fabricated by traditional lithography and characterized by a THz time-domain spectroscopy system (THz-TDS) for bovine serum albumin (BSA) and glucose solution detections. The experimental results reveal that the resonant frequencies show significant redshifts when the concentrations of BSA and glucose solution increase. For the MM-1 sensor, the limit of detections (LODs) for BSA and glucose solutions are 0.13 mg/mL and 1.31 mmol/L, respectively. For the MM-2 sensor, the frequency shift reaches 80.2 GHz when the concentration of BSA is as high as 10 mg/mL, and the LODs for BSA and glucose solutions are 0.19 mg/mL and 2.37 mmol/L, respectively. The sensors exhibit the merits of small size, easy operation, and fast detection speed, and show the potential for rapid concentration measurement, biomolecular detection, and disease diagnosis in the biomedical field.