Effect of TiN thin films deposited by oblique angle sputter deposition on sol-gel coated TiO2 layers for photocatalytic applications

TiO2 monolayer and TiN/TiO2 bilayer coatings were deposited on soda-lime glass prepared by mixing two techniques, TiO2 was deposited by sol-gel dip-coating and TiN film was deposited by oblique angle deposition using reactive magnetron sputtering at α=45°. Structural analysis showed typical peaks of TiO2 anatase phase and cubic (Na-Cl type) structure of TiN. Roughness value of 3 nm was obtained for the TiN/TiO2 bilayer film with a rise and elongated grains size. It was found that the optical band gap energy decreases after coupling the TiN sub-layer which is explained by the incorporation of N atoms into TiO2 structure. At constant UV irradiation time, the photo-degradation of methylene blue rate increased for TiN/TiO2 film by 4% compared to TiO2 film.