Optical Detection In Diamond Chemical Vapor Deposition

We have employed a variety of in-situ optical diagnostic probes to analyze the filament-assisted diamond deposition gas-phase environment. In this paper, our studies using infrared diode laser absorption and multiphoton ionization spectroscopies are summarized. Emphasis is placed on a recently developed technique for the detection of gas-phase atomic hydrogen using third harmonic generation. The results are discussed in terms of the growth environment, the role of atomic hydrogen, and the carbon deposition mechanism.