High power single mode 980nm DBR tapered diode lasers with integrated sixth order surface gratings based on simplified fabrication process

We report on distributed Bragg reflector tapered lasers having 6th order surface gratings and ridge waveguides simultaneously fabricated by wafer stepper lithography and reactive ion etching. Single longitudinal mode emission at 978 nm and a beam propagation ratio of M2 = 1.1 at 4.4 W have been obtained in quasi-continuous wave operation. In CW operation, a maximal output power of 2.5 W with a side-mode suppression ratio of more than 20 dB and a beam propagation ratio of M2 < 1.4 for the central lobe has been achieved.