Measurement of Young′s Modulus of Nanobeam Based on AFM

The theory and method of bending test on nanobeam for the measurement of Young′s modulus based on atomic force microscope(AFM) are introduced.Three issues are mainly solved during the measurement of Young′s modulus of nanobeam: the correction of Young′s modulus model for a broad beam;a method for the precise measurement of the thickness of nanobeam;the evaluation of the influence of the load force position on test results.The experimental result of Young′s modulus of the silicon nanobeam structure used in this paper is(183.79±4.18) GPa.