Inorganic mass spectrometry plays an important role in the analysis of solid samples.In this paper, four mass spectrometry techniques including glow discharge mass spectrometry(GDMS),secondary ion mass spectrometry(SIMS),laser ionization mass spectrometry(LIMS),and laser ablation inductively coupled plasma mass spectrometry(LA-ICPMS) are reviewed.The principle of instrumental analysis,applications, advantages and shortages for each technique are described.