Multidirectional lateral shearing random-step instantaneous phase-shifting interferometry for aspherical measurement

/150, with measurement errors reduced by 27.06% and 32.05%, respectively, compared to quadriwave lateral shearing interferometry (QWLSI) baseline measurements. The experimental results verified that the validation against LUPHOScan profilometry confirmed MLSIPSI's superior precision for steep asphericity departures.