Recent progress of Ga2O3-based gas sensors

In recent years, gas sensors fabricated from gallium oxide (Ga 2 O 3 ) materials have aroused intense research interest due to the superior material properties of large dielectric constant, good thermal and chemical stability, excellent electrical properties, and good gas sensing. Over the past decades, Ga 2 O 3 -based gas sensors experienced rapid development. The long-term stable Ga 2 O 3 -based gas sensors for detecting oxygen and carbon monoxide have been commercialized and renowned with extremely good gas sensing characteristics. Recent pioneering studies also exhibit that the Ga 2 O 3 -based gas sensors possess great potentials in applications of detecting nitrogen oxides, hydrogen, volatile organic compounds and ammonia gases. This article presents recent advances in gas sensing mechanism, device performance parameters, influence factors, and applications of Ga 2 O 3 -based gas sensors. The impacts of influence factors, doping, material structure and device structure on the performance of gas sensors are discussed in detail. Finally, a brief overview of challenges and opportunities for the Ga 2 O 3 -based gas sensors is presented.