PROPERTIES OF DIAMOND LIKE CARBON FILMS PREPARED BY RF MAGNETRON SPUTTERING AND DC MAGNETRON SPUTTERING

Diamond like carbon films(DLC) were deposited on Si(100) substrates by high-purity graphite using direct current(DC) magnetron sputtering and radio frequency(RF) magnetron sputtering method.Microstructure,surface and sectional morphologies were investigated by Raman spectroscopy and SEM.Ttheir relations with sputtering parameter were studied too.The particle transportation mechanism during sputtering was explained.The results show that the films prepared by two sputtering ways have condign sp3 bond.The content of sp3 bonds in RF-DLC is higher than that in DC-DLC.The quality and surface roughness of RF-DLC films are better than that of DC-DLC films.