Multifrequency ultrasonic transducers based on dual vibration and harmonic mode

Multifrequency ultrasonic transducers have broad application prospects in the field of biomedical due to their high imaging resolution and detection depth. This paper proposed a design method of triple frequency single-element transducers by finite element method(FEM). The triple frequency transducers are based on contour mode, thickness mode and the third harmonic of thickness mode. Nine micro single element transducers with different widths and matching layers were fabricated and characterized to verify the design method. The traditional 30 MHz single frequency transducer and 2.3 MHz 1–3 piezoelectric composite transducer were used to compare with high frequency part and low frequency part of the triple frequency transducers, respectively. The pulse-echo characteristics of the triple frequency transducers have impressive low and middle frequency part. The high frequency part is similar with traditional transducer except the sensitivity is 0.5 times. The results certify the feasibility of a triple-Frequency transducer based on dual vibration and harmonic modes.