Optimal oxide-aperture for improving the power conversion efficiency of VCSEL arrays

The maximum power conversion efficiencies of the top-emitting, oxide-confined, two-dimensional integrated 2×2 and 4×4 vertical-cavity surface-emitting laser (VCSEL) arrays with the oxide-apertures of 6 μm, 16 μm, 19 μm, 26 μm, 29 μm, 36 μm, 39 μm, and 46 μm are fabricated and characterized, respectively. The maximum power conversion efficiencies increase rapidly with the augment of oxide-aperture at the beginning and then decrease slowly. A maximum value of 27.91% at an oxide-aperture of 18.6 μm is achieved by simulation. The experimental data are well consistent with the simulation results, which are analyzed by utilizing an empirical model.