材料科学
纳米复合材料
薄膜晶体管
电介质
高-κ电介质
纳米颗粒
铪
并五苯
绝缘体(电)
氧化物
光电子学
化学工程
复合材料
纳米技术
冶金
图层(电子)
锆
工程类
作者
Shang Hao Piao,Hyeonju Lee,Jaehoon Park,Hyoung Jin Choi
标识
DOI:10.1166/jnn.2020.17567
摘要
We fabricate 6,13-bis(triisopropylsilylethynyl) pentacene (TIPS-Pn) thin-film transistors (TFTs) with nanocomposite insulators. The insulator layers consist of both poly(4-vinylphenol-co-methyl methacrylate) and high-dielectric constant hafnium oxide (HfO₂) nanoparticles. The HfO₂ nanoparticles are ball-milled for sufficient dispersion in a nanocomposite solution to enable solution process methods to be used in preparing the insulator layers. The nanocomposite insulators demonstrate high capacitances and improve the performance of TIPS-Pn TFTs. Nonetheless, particle aggregates are produced in the nanocomposites solution with high HfO₂ concentrations, generating detrimental effects on the dielectric properties and the TFT performance. Our experimental result implies that the optimum concentration of HfO₂ nanoparticles in a mixed solution will find to be ~11.5 wt%.
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