Jiangnan Liu,Walter Shin,Ping Wang,Ding Wang,Mohammad Soltani,Zetian Mi
标识
DOI：10.1109/ipc53466.2022.9975776
摘要
We report on the epitaxy and properties of ferroelectric ScAlN and further demonstrate ScAlN-based microring resonator device on sapphire substrate operating within the telecom window (1500 nm) with an intrinsic quality factor (Q-factor) of 5800.
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(2025-6-4)
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