Morphology studies of Sol-spin-coating synthesis derived BaTiO_3 thin films by SPM

BaTiO3(BT) thin films were prepared on Si(100) substrates by the sol-spin-coating technique with stable precursor solution.The thermolysis processes of BT-gel was analyzed by differential thermal analysis and thermogravimetry analysis(DTA-TGA).And for the first time we investigated the growing process of the ceramic films clearly from Three Dimensions by advanced Atomic Force Microscopy(AFM) which is one microscopy of Scanning probe Microscope(SPM).And the effects of heating on phase formation were investigated by XRD.In this way,the uniform and densified barium titanate(BT) films were obtained,with grain size was in the range of 50 to 70 nm and the best calcining temperature was 700℃.