光电子学
材料科学
垂直腔面发射激光器
制作
化学气相沉积
激光器
金属有机气相外延
光学
纳米技术
图层(电子)
外延
物理
医学
替代医学
病理
作者
Hsin-Chieh Yu,Zhi-Wei Zheng,Yang Mei,Rongbin Xu,Jianping Liu,Hui Yang,Bao-Ping Zhang,Tien‐Chang Lu,Hao‐Chung Kuo
标识
DOI:10.1016/j.pquantelec.2018.02.001
摘要
GaN is a great material for making optoelectronic devices in the blue, blue-violet and green bands. Vertical-cavity surface-emitting lasers (VCSELs) have many advantages including small footprint, circular symmetry of output beam, two-dimensional scalability and/or addressability, surface-mount packaging, good price-performance ratio, and simple optics/alignment for output coupling. In this paper, we would like to (1) Review the design and fabrication of GaN-based VCSELs including some technology challenges, (2) Discuss the design and metalorganic chemical vapor deposition (MOCVD) growth of electrically pumped blue VCSELs and (3) Demonstrate world first green VCSEL using quantum dots (QDs) active region to overcome the 'green gap'.
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