Reducing intrinsic energy dissipation in diamond-on-diamond mechanical resonators toward one million quality factor

This paper reports a batch fabrication of ultrahigh quality-factor single-crystal diamond microelectromechanical system resonators on diamond by using a smart-cut method and atomic scale etching of the defects within the resonators. As a result, the intrinsic energy dissipation induced by bulk defects is markedly reduced and quality factors over one million are realized, which can lead to the fabrication of highly sensitive physical and chemical sensors with high reliability.